红外与激光工程
2023, 52(5): 20220825
清华大学精密仪器系精密测试技术及仪器国家重点实验室,北京 100084
表面形貌检测是工业生产和科学研究所需的关键技术之一,高精度和高效率是该领域一直以来的发展方向。光学频率梳有着独特宽光谱、窄线宽和稳定频率的特性,展现了优越的计量潜力,在表面形貌测量领域有着重要的应用并取得了重要的进展。首先介绍了光学频率梳的定义;根据不同的技术路线,分类回顾了光学频率梳在形貌测量中的研究现状及特点;最后,对基于光频梳的形貌测量技术进行了展望。
光学频率梳 形貌检测 干涉 显微 轮廓术 激光与光电子学进展
2023, 60(3): 0312013
1 清华大学精密仪器系精密测试技术及仪器国家重点实验室, 北京 100084
2 清华大学深圳国际研究生院先进制造学部, 广东 深圳 518055
距离测量作为几何量测量关键共性基础技术之一,在科学研究、高端装备制造及空间探测等领域有重要应用。新兴的双光梳绝对测距技术充分发挥了光学频率梳的时域超短脉冲和频域高分辨特性,能实现大范围、高精度、高测速的绝对距离测量。首先,在简要阐述双光梳基本原理的基础上,着重介绍了双光梳飞行时间法测距和相位法测距的研究进展;然后,介绍了双光梳测距技术的功能拓展、仪器化进程及应用实例;最后,对双光梳测距的发展进行了展望。
测量 绝对距离测量 双光梳 飞行时间法测距 相位法测距 仪器化及应用 中国激光
2021, 48(15): 1504002
Author Affiliations
Abstract
1 State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
2 Division of Advanced Manufacturing, Graduate School at Shenzhen, Tsinghua University, Shenzhen 518055, China
Precise and fast determination of position and orientation, which is normally achieved by distance and angle measurements, has broad applications in academia and industry. We propose a dynamic three-degree-of-freedom measurement technique based on dual-comb interferometry and a self-designed grating-corner-cube (GCC) combined sensor. Benefiting from its unique combination of diffraction and reflection characteristics, the absolute distance, pitch, and yaw of the GCC sensor can be determined simultaneously by resolving the phase spectra of the corresponding diffracted beams. We experimentally demonstrate that the method exhibits a ranging precision (Allan deviation) of 13.7 nm and an angular precision of 0.088 arcsec, alongside a 1 ms reaction time. The proposed technique is capable of precise and fast measurement of distances and two-dimensional angles over long stand-off distances. A system with such an overall performance may be potentially applied to space missions, including in tight formation-flying satellites, for spacecraft rendezvous and docking, and for antenna measurement as well as the precise manufacture of components including lithography machines and aircraft-manufacturing devices.
Photonics Research
2021, 9(2): 02000243
State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, China
constant fraction discriminator (CFD) timeofflight (TOF) pulsed TOF laser rangending direct-current (DC) bias error Frontiers of Optoelectronics
2012, 5(2): 182